Passive and fixed alignment of devices using flexible silicon elements formed by selective etching

Journal of Micromechanics and Microengineering

Volumn 8, Issue 1, 1998, Pages 39-44

  Strandman, Carola ^a   Bäcklund, Ylva ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTROCHEMISTRY; ETCHING; MICROELECTRONICS; PASSIVATION; PHOTOVOLTAIC EFFECTS; SILICON WAFERS; SUBSTRATES;

PHOTOVOLTAIC ELECTROCHEMICAL ETCH STOP TECHNIQUE (PHET);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032022213     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/1/007     Document Type: Article

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