SU-8 3D microoptic components fabricated by inclined UV lithography in water

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 245-251

  Ling, Z ^a   Lian, K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

ALIGNMENT ACCURACY; INTEGRATED MICROOPTIC SYSTEM; UV LITHOGRAPHY;

MICROOPTICS;

EID: 33845800466     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0175-2     Document Type: Article

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