A novel device of passive and fixed alignment of optical fiber

Microsystem Technologies

Volumn 10, Issue 4, 2004, Pages 269-271

  Liu, J ^a   Cai, B ^a   Zhu, J ^a   Chen, D ^a   Li, Y ^a   Zhang, J ^a   Ding, G ^a   Zhao, X ^a   Yang, C ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

MOEMS; Optical fiber; Passive and fixed alignment; SU 8 photoresist; UV LIGA

Indexed keywords

ALIGNMENT; ASPECT RATIO; ETCHING; HEAT TREATMENT; MICROOPTICS; OPTICAL COMMUNICATION; PHOTORESISTS;

MOEMS; PASSIVE AND FIXED ALIGNMENT; SU-8 PHOTORESISTS; UV-LIGA;

OPTICAL FIBERS;

EID: 3042549209     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0291-6     Document Type: Article

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