Fatigue and debris generation at indentation-induced cracks in silicon

Acta Materialia

Volumn 57, Issue 2, 2009, Pages 582-589

  Bhowmick, Sanjit ^a   Cha, Hyunmin ^b   Jung, Yeon Gil ^b   Lawn, Brian R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Changwon National University   (South Korea)

Author keywords

Contact damage; Fatigue; Internal friction; Silicon

Indexed keywords

CRACKS; DEBRIS; ELASTIC WAVES; FRICTION; GERMANIUM; INDENTATION; INTERNAL FRICTION; NONMETALS; POLYSILICON; SURFACES; TRIBOLOGY; VICKERS HARDNESS TESTING;

BULK SILICONS; CONTACT DAMAGE; CRACK INTERFACES; CYCLIC LOADINGS; DAMAGE ACCUMULATIONS; DEBRIS GENERATIONS; FATIGUE; GERMANIUM SURFACES; HARD SPHERES; INDENTATION TESTS; INDENTER; INDUCED CRACKS; MASS REMOVALS; MATERIAL EJECTIONS; MONOCRYSTALLINE; POLYCRYSTALLINE SILICONS; RING CRACKS; SECONDARY CRACKS; SILICON SURFACES; SPECIMEN SURFACES;

FATIGUE DAMAGE;

EID: 57949091580     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2008.10.006     Document Type: Article

References (34)

1. Chen T.J., and Knapp W.J. J Am Ceram Soc 63 (1980) 225
2. Lawn B.R., Marshall D.B., and Chantikul P. J Mater Sci 16 (1981) 1769
3. Renuart E.D., Fitzgerald A.M., Kenny T.W., and Dauskardt R.H. J Mater Res 19 (2004) 2635
4. Cook R.F. J Mater Sci 41 (2006) 841
5. Michalske T.A., and Freiman S.W. Nature 295 (1981) 511
6. Muhlstein C.L., Brown S.B., and Ritchie R.O. Sensors and Actuators A94 (2001) 177
7. Muhlstein C.L., Stach E.A., and Ritchie R.O. Acta Mater 50 (2002) 3579
8. Shrotriya P., Allameh S., Brown S., Suo Z., and Soboyejo W.O. Exper Mech 43 (2003) 289
9. Alsem D.A., Pierron O.N., Stach E.A., Muhlstein C.L., and Ritchie R.O. Adv Eng Mater 9 (2007) 15
10. Pierron O.N., and Muhlstein C.L. Fatigue Fracture Eng Mater Struct 30 (2007) 57
11. Ballarini R., Mullen R.L., Yin Y., Kahn H., Stemmer S., and Heuer A.H. J Mater Res 12 (1997) 915
12. Kahn H., Ballarini R., Mullen R.L., and Heuer A.H. Proc R Soc Lond A455 (1999) 3807
13. Kahn H., Tayebi N., Ballarini R., Mullen R.L., and Heuer A.H. Sensors and Actuators A82 (2000) 274
14. Kahn H., Ballarini R., Bellante J.J., and Heuer A.H. Science 298 (2002) 1215
15. Kahn H., Ballarini R., and Heuer A.H. Curr Opin Solid State Mater Sci 8 (2004) 71
16. Bhowmick S., Meléndez-Martínez J.J., and Lawn B.R. Appl Phys Lett 91 (2007) 201902
17. Bhowmick S., Meléndez-Martínez J.J., and Lawn B.R. J Mater Res 23 (2008) 1175
18. Lawn B.R. J Appl Phys 39 (1968) 4828
19. Rhee Y.-.W., Kim H.-.W., Deng Y., and Lawn B.R. J Am Ceram Soc 84 (2001) 561
20. Howes V.R., and Tolansky S. Proc R Soc Lond A230 (1955) 287
21. Howes V.R., and Tolansky S. Proc R Soc Lond A230 (1955) 294
22. Kailer A., Gogotsi Y.G., and Nickel K.G. J Appl Phys 81 (1997) 3057
23. Bradby J.G., Williams J.S., Wong-Leung J., Swain M.V., and Munroe P. J Mater Res 16 (2001) 1500
24. Lawn B.R. J Am Ceram Soc 81 (1998) 1977
25. Johnson K.L., O'Connor J.J., and Woodward A.C. Proc R Soc Lond A334 (1973) 95
26. Jung Y.-G., Pajares A., Banerjee R., and Lawn B.R. Acta Mater 52 (2004) 3459
27. Zarudi I., Zhang L.C., and Swain M.V. J Mater Res 18 (2003) 758
28. Williams J.S., Lawn B.R., and Swain M.V. Phys Status Solidi (A) 2 (1970) 7
29. Swain M.V., Lawn B.R., and Burns S.J. J Mater Sci 9 (1974) 175
30. Frank F.C., and Lawn B.R. Proc R Soc Lond A299 (1967) 291
31. Kocer C., and Collins R.E. J Am Ceram Soc 81 (1998) 1736
32. Marshall D.B., and Evans A.G. J Am Ceram Soc 68 (1985) 225
33. Rödel J., Kelly J., and Lawn B.R. J Am Ceram Soc 73 (1990) 3313
34. Lawn B.R., Padture N.P., Cai H., and Guiberteau F. Science 263 (1994) 1114