Charge distribution on narrow MEMS beams of nearly square cross-section

Communications in Numerical Methods in Engineering

Volumn 24, Issue 11, 2008, Pages 1135-1148

  Chen, Hui ^a   Mukherjee, Subrata ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

Boundary element method; Charge distribution; Microelectromechanical systems; Narrow beatos

Indexed keywords

CHARGE DISTRIBUTION; CHARGED PARTICLES; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; NUMERICAL ANALYSIS;

ELECTROSTATIC PROBLEMS; LINE MODELS; MICROELECTROMECHANICAL SYSTEMS; NARROW BEATOS; NEW APPROACHES; NUMERICAL RESULTS; SELECTED EXAMPLES;

BOUNDARY ELEMENT METHOD;

EID: 57749200469     PISSN: 10698299     EISSN: 10990887     Source Type: Journal    
DOI: 10.1002/cnm.1021     Document Type: Article

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