Some answers to new challenges in optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7155, Issue , 2008, Pages

  Osten, W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Asphere testing; Calibration; Optical metrology; Resolution enhancement

Indexed keywords

CALIBRATION; INSPECTION; MICROOPTICS; PRODUCTION ENGINEERING; QUALITY ASSURANCE; SEMICONDUCTOR LASERS; TOTAL QUALITY MANAGEMENT; UNCERTAINTY ANALYSIS;

ASPHERE TESTING; ASPHERIC LENS; CONSISTENT QUALITIES; DIFFRACTION LIMITEDS; FEATURE SIZES; FREE-FORM SURFACES; HIGH COSTS; IN LINES; IN PROCESS; INCREASED FLEXIBILITIES; INSPECTION TECHNOLOGIES; LATERAL RESOLUTIONS; MATERIAL FAULTS; MEASUREMENT RESULTS; MEASUREMENT TECHNIQUES; MICRO COMPONENTS; MICROSCOPIC TECHNIQUES; NEW APPROACHES; NEW PRODUCTS; NEW TECHNOLOGIES; ON WAFERS; OPTICAL IMAGING; OPTICAL METROLOGY; PHYSICAL LIMITATIONS; PRODUCTION CHAINS; PRODUCTION PROCESS; PRODUCTION SYSTEMS; REAL-TIME FEEDBACKS; RELIABLE DETECTIONS; RELIABLE MEASUREMENTS; RESOLUTION ENHANCEMENT; SEMICONDUCTOR STRUCTURES;

MEASUREMENTS;

EID: 57649099460     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814687     Document Type: Conference Paper

References (37)

1. SEMATECH, http://www.itrs.net/Links/2007ITRS/Home2007.htm
2. W. Osten, W. Jüptner, "New Light Sources and Sensors for Active Optical 3D-Inspection," Proc. SPIE Vol. 3897, 1999, pp. 314-327.
3. W. Osten, "Progress in total light control: components, methods, and applications," Proc. SPIE Vol. 6341(2006), 63410G-1 -63410G-12.
4. E. Abbe, "Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung," Archiv für Mikroskopische Anatomic. Vol. 9(1873), pp. 413-468
5. M. Totzeck, W. Ullrich, A. Göhnermeier, and W. Kaiser, "Pushing deep ultraviolet lithography to its limits," nature photonics Vol. 1, November 2007, pp. 629- 631.
6. S.W. Hell, and J. Wichmann, "Breaking the diffraction resolution limit by stimulated emission," Opt. Lett. 19(1994)11, pp. 780-782
7. A. Tavrov, N. Kerwien, R. Berger, H. Tiziani, M. Totzeck, B. Spektor, and J. Shamir, "Vector simulation of dark beam interaction with nano-scale surface features," Proc. SPIE Vol. 5144(2003), pp. 26-36
8. B. Bodermann, G. Ehret, and W. Mirande, "UV and DUV microscopy for dimensional metrology on micro- and nanostructures," Proc. SPIE Vol. 5457(2004), pp35-43
9. w. Osten, N. Kerwien, "Resolution enhancement technologies in optical metrology," Proc. SPIE Vol. 5776(2005), pp. 10-21
10. M. Totzeck, H. Jacobsen, and H. Tiziani, "Edge localization of sub-wavelength structures using polarization interferometry and extreme-value criteria," Applied Optics 39(2000), pp. 6295-6305
11. w. Osten, and M. Kujawinska, M.: Active phase measuring metrology. In: P.K. Rastogi and D. Inaudi (Eds.): Trends in Optical Nondestructive Testing and Inspection, Elsevier Science B.V. 2000, pp. 45-69
12. T. Schuster, S. Rafler, W. Osten, P. Reinig, and T. Hingst, "Scatterometry from crossed grating structures in different configurations," Proc. SPIE: Vol. 6617(2007), 661715-1 - 661715-9
13. N. Kerwien, About the influence of polarization effects in microscopic image generation. PhD disstertation, University Stuttgart 2007
14. J. J. Cox, and R. Sheppard, "Information capacity and resolution in an optical system," J. Opt. Soc. Am. A 3(1986), pp. 1152-1158
15. W. Osten, and M. Totzeck, "Optics beyond the limit: The future of high precision optical metrology and implications for optical lithography," Proc. 2004 ICO International Conference ICO'04, pp. 589-592, Tokyo 2004
16. P. Andrä, E. Ivanov, and W. Osten, "Scaled Topometry - An Active Measurement Approach for Wide Scale 3D Surface Inspection," Proc. Fringe'97. Akademie Verlag Berlin, Berlin 1997, pp. 179-189
17. W. Osten, P. Andrä, D. Kayser, "Hochauflösende Vermessung ausgedehnter Oberflachen mit skalierbarer Topometrie. (High resolution measurement of extended technical surfaces with scalable topometry)", Technisches Messen 66(1999) 11, pp. 413-428
18. W. Osten, D. Kayser, and Th. Bothe, W. Jüptner, ""High resolution measurement of extended technical surfaces with scalable topometry," Proc. SPIE Vol. 4101A(2000), pp. 166-172
19. D. Kayser, Th. Bothe, and W. Osten, "Scaled topometry in a multisensor approach," Opt. Eng. 43(2004)10, pp. 2469-2477
20. G. Häusler, and G. Leuchs, "Physikalische Grenzen der optischen Formerfassung mit Licht," Physikalische Blätter 53(1997)5, pp. 417-421
21. H.M. Pedersen, "On the contrast of polychromatic speckle patterns and its dependence on surface roughness," Opt. Acta 22(1975), 14-24
22. W. Schreiber, G. Notni, "Theory and arrangements of self-calibrating whole-body three-dimensional measurement systems using fringe projection technique," Opt. Eng. 39(2000), 159-169
23. E. Garbusi, C. Pruss, J. Liesener, and W. Osten, "New technique for flexible and rapid measurement of precision aspheres," Proc. SPIE Vol. 6616(2007), 661629-1 - 661629-11
24. C. Pruss, S. Reichelt, H. J. Tiziani, and W. Osten, "Computer generated holograms in interferometric testing", Opt. Eng. 43(2004), 2534-2540
25. P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, "Subaperture stitching interferometry for testing mild aspheres", Proc. SPIE Vol. 6293(2006), 62930J.
26. M. Kuechel, "Absolute measurement of rotationally symmetrical aspheric surfaces", OSA Optical Fabrication and Testing, Rochester, 2006.
27. J. Liesener, and H. J. Tiziani, "Interferometer wit dynamic reference", Proc. SPIE Vol. 5252(2004), 264-271
28. Patent pending: DPMA: 10 2006 057 606.3
29. W. Osten, Th. Baumbach, and W. Jüptner, "Comparative Digital Holography," Opt. Lett. 27(2002)20, 1764-1766
30. Th. Baumbach, W. Osten, C. von Kopylow, and W. Judie;ptner, "Remote metrology by comparative digital holography.," Appl. Opt. 45(2006)5, 925-934
31. J. Korvink, and O. Paul (Eds.), MEMS - A Practical Guide to Design, Analysis and Applications. W. Andrew Publishing 2006
32. J. Gaspar, M. Schmidt, J. Held, and Paul O., "High-throughput wafer-scale microtensile testing of thin films," IEEE MEMS 2008
33. W. Osten, (Ed.), Optical Inspection of Microsystems. Taylor & Francis, Boca Raton 2006
34. SPOTS: Standardization Project for Optical Techniques of Strain Measurement, www.opticalstrain.org
35. E. Hack, G. Sims, D. Mendels, Traceability, reference materials and standardised tests in optical strain measurement, in Advances in Experimental Mechanics, C. Pappalettere (Ed.), McGraw-Hill (2004), pp. 693-696
36. M. Kujawinska et al., "Calibration and assessment of full-field optical strain measurement procedures and instrumentation", Proc. SPIE Vol. 6341 (2006), 63410Q
37. G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, "Calibration of optical systems for the measurement of microcomponents," Opt. and Lasers in Engn. (submitted for publication)