Vector simulations of dark beam interaction with nano-scale surface features

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 26-36

  Tavrov, A ^a   Kerwien, N ^a   Berger, R ^a   Tiziani, H ^a   Totzeck, M ^a   Spektor, B ^b   Shamir, J ^b   Toker, G ^c   Brunfeld, A ^c  

^a UNIVERSITY OF STUTTGART   (Germany)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c Amsys Ltd   (Israel)

Author keywords

Dark beam; High NA; Microscopy; Nano scale; Polarization

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; ESTIMATION; LIGHT POLARIZATION; OPTICAL MICROSCOPY; SIGNAL TO NOISE RATIO; SURFACE PROPERTIES; WAVE EQUATIONS;

DARK BEAM; DARK BEAM MICROSCOPE; GAUSSIAN BEAM; NANOSCALE SURFACE; RIGOROUS COUPLED WAVE ANALYSIS;

LASER BEAMS;

EID: 0141608987     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500588     Document Type: Conference Paper

References (13)

1. A. Brunfeld, G. Toker, and J. Shamir, High resolution inspection method for in-line surface testing, DMTC'95 (Santa Clara, CA, January 31-February 2, 1995).
2. B. Spektor, G. Toker, J. Shamir, M. Friedman, A. Brunfeld, "High-resolution surface feature evaluation using multiwavelength optical transforms", SPIE Proc. 4777, 345-351 (2002), Interferometry XI: Techniques and Analysis, Katherine Creath; Joanna Schmit; Eds.
3. M. G. Moharan, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Am. A 12, 1068-1076 (1995).
4. M. G. Moharan, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A 12, 1077-1086 (1995).
5. H. H. Hopkins, "Image formation with partially coherent light," Photograph. Sci. Eng. 21, 114-123 (1977).
6. M. Totzeck, H. Jacobsen, and H. J. Tiziani, "Edge localization of subwavelength structures by use of polarization interferometry and extreme-value criteria," Appl. Opt. 39, 6295-6305 (2000).
7. M. Totzeck, "Numerical simulation of high-NA quantitative polarization microscopy and corresponding near-fields," Optik (Stuttgart) 112(9), 399-406 (2001).
8. Denisenko, Vladimir G., Vasnetsov, Mikhail V., Soskin, Marat S., "Distribution of orbital angular momentum in a combined beam carrying optical vortices", SPIE Proc. 4403, 82-89 (2001), Second International Conference on Singular Optics (Optical Vortices): Fundamentals and Applications, Marat S. Soskin; Mikhail V. Vasnetsov; Eds.
9. G. Toker, A. Brunfeld, J. Shamir, B. Spektor, E. F. Cromwell, Jo. F. Adam, "In-line optical surface roughness determination by laser scanning", SPIE Proc. 4777, 323-329 (2002), Interferometry XI: Techniques and Analysis, Katherine Creath; Joanna Schmit; Eds.
10. M. Totzeck, H. Jacobsen, and H. J. Tiziani, "Edge localization of subwavelength structures by use of polarization interferometry and extreme-value criteria," Appl. Opt. 39, 6295-6305 (2000).
11. Richards, B., and Wolf, E., Proc. Roy. Soc. (London) A, 253, 358 (1959).
12. D. Gabor, "Theory of Communication," J. Inst. Elec. Eng. 93/III, 429-457 (1946)
13. M. Friedman, T. Kotzer, and J. Shamir, "High-quality surface measurements using Gabor expansion," Proc. SPIE 2651, 117-125 (1996).