Hydrogenation-assisted lateral micromachining of (111) silicon wafers

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1489-1494

  Darbari, Sara ^a   Azimi, Soheil ^a   Mohajerzadeh, Shamsoddin ^a   Sammak, Amir ^a   Izadi, Nima ^a   Famini, Shaya ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

(111) wafers; Chemical etching; Hydrogenation; Micromachining

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; ETCHING; HYDROGENATION; MACHINING; MICROMACHINING; NONMETALS; SEMICONDUCTING SILICON COMPOUNDS; SILICON;

(111) WAFERS; CAPACITIVE ACCELEROMETERS; CHEMICAL ETCHING; CHEMICAL ETCHINGS; INTERDIGITAL STRUCTURES; KOH SOLUTIONS; OXIDE LAYERS; PLASMA HYDROGENATIONS; SENSOR FABRICATIONS; SUSPENDED STRUCTURES; THERMALLY GROWN OXIDES; UNDERETCHING; VERTICAL ETCHINGS;

SILICON WAFERS;

EID: 57449101834     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2007247     Document Type: Article

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