Anomalous anisotropic etching of (111) and (100) silicon wafers using acidic solutions

Journal of the Electrochemical Society

Volumn 153, Issue 7, 2006, Pages

  Famini, S ^a   Esfandyarpour, B ^a   Mohajerzadeh, S ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTALLOGRAPHY; ETCHING; NITRIC ACID;

ANISOTROPIC ETCHING; CHEMICAL WET ETCHING; FRACTAL STRUCTURES;

SILICON WAFERS;

EID: 33744816215     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2202099     Document Type: Article

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