Experiments for microphotonic components fabrication using Si 〈1 1 1〉 etching techniques

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 92-97

  Cristea, Dana ^a   Purica, Munizer ^a   Manea, Elena ^a   Avramescu, Viorel ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Diaphragms; Micromachining; Waveguides; Wet etching

Indexed keywords

ANISOTROPY; ETCHING; FABRICATION; MASKS; MICROMACHINING; MIRRORS; MOLECULAR ORIENTATION; WAVEGUIDES;

WET ETCHING;

SILICON WAFERS;

EID: 0037198098     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00904-9     Document Type: Conference Paper

References (10)

1. Silicon as mechanical material