Zero-power latching, large-stroke, high-precision linear microactuator for lightweight structures in space

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 726-729

  Toda, Risaku ^a   Yang, Eui Hyeok ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT WEIGHT STRUCTURES; MICROELECTROMECHANICAL DEVICES; PRECISION ENGINEERING; VOLTAGE CONTROL;

ACTUATOR VOLTAGE; ELECTROSTATIC COMB; SPRING LOAD; ZERO-POWER LATCHING;

MICROACTUATORS;

EID: 33750125250     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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