Extra-low temperature growth of ZnO thin films by atomic layer deposition

Journal of the Korean Physical Society

Volumn 53, Issue 5 PART 2, 2008, Pages 2880-2883

  Guziewicz, E ^a   Godlewski, M ^a,b   Kopalko, K ^a   Kowalik, I A ^a   Yatsunenko, S ^a   Osinnyi, V ^a   Paszkowicz, W ^a   Lusakowska E ^a   Dluzewski P ^a  

^a INSTITUTE OF PHYSICS   (Poland)

^b CARDINAL STEFAN WYSZY SKI UNIVERSITY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 57349145513     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.53.2880     Document Type: Conference Paper

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