Interferometric profiling of microcantilevers in liquid

Optics and Lasers in Engineering

Volumn 47, Issue 2, 2009, Pages 217-222

  Reed, Jason ^a,c   Schmit, Joanna ^b   Han, Sen ^b   Wilkinson, Paul ^a   Gimzewski, J K ^a,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b VEECO INSTRUMENTS INC   (United States)

^c CALIFORNIA NANOSYSTEMS INSTITUTE   (United States)

Author keywords

Biosensor; Interferometric microscope; Liquid environment; Microcantilever; Optical profiler

Indexed keywords

BIOSENSORS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; COMPUTATIONAL METHODS; INTERFEROMETRY; NATURAL FREQUENCIES; SILICON;

AND ENVIRONMENTS; BIOCHEMICAL STIMULUS; CANTILEVER ARRAYS; CANTILEVER SENSORS; COMPUTATIONAL ANALYSES; DYNAMIC BEHAVIORS; HIGHLY SENSITIVES; IN VACUUMS; INTERFEROMETRIC MICROSCOPE; INTERFEROMETRIC MICROSCOPES; INTERFEROMETRIC MICROSCOPIES; LIQUID ENVIRONMENT; LONGITUDINAL MODES; MICRO CANTILEVERS; MICROCANTILEVER; OPTICAL PROFILER; QUALITY FACTORS; RESONANCE MODES; RESONANT FREQUENCIES; RESONANT MODES; SILICON MICRO CANTILEVERS; SPATIAL VISUALIZATIONS; SPECIFIC KNOWLEDGES;

FREQUENCY RESPONSE;

EID: 56949106808     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.04.024     Document Type: Article

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