Template-based software for accurate MEMS characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 75-80

  Novak, Erik ^a   Krell, Michael B ^a   Browne, Trisha ^a  

^a Veeco Metrology   (United States)

Author keywords

Critical dimension; Interferometry; MEMS; Metrology; Profilometry

Indexed keywords

COMPUTER SOFTWARE; DATA REDUCTION; INTERFEROMETRY; PROFILOMETRY;

CRITICAL DIMENSIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038735385     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478204     Document Type: Conference Paper

References (4)

1. th Annual IEEE International Micro Electro Mechanical Systems, Orlando, Flordia, January '99
2. Raj K. Gupta, "Electronically Probed Measurements of MEMS Geometries"; Journal of Microelectromechanical Systems, Vol 9, No. 3, Sept 2000
3. J.P. Blanc, M. Belleville, F. Mieyeville, and H. Bono, "Automatic evaluation of sensors geometrical parameters," Design, Text Microfab. MEMS MOEMS Symp Dig. vol 3680, '00 pp 94-102, Paris, France
4. R. C. Gutierrez, K.V. Shcheglov and T.K. Tang; "Pulsed source interferometry for characterization of resonant micromachined structures." Digest, Solid State Sensors & Actuator Workshop '98, pp 327-327. Hilton Head, S.C.