High-resolution imaging of elastic properties using harmonic cantilevers

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 183-190

  Sahin, O ^a   Yaralioglu, G ^a   Grow, R ^a   Zappe, S F ^a   Atalar, A ^b   Quate, C ^a   Solgaard, O ^a  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

Atomic force microscope; Cantilever; Elastic properties; Tapping mode

Indexed keywords

ELASTIC PROPERTIES; FLEXURAL RESONANCE; TAPPING MODE; VIBRATION SPECTRUM;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; ELASTICITY; IMAGING TECHNIQUES; NATURAL FREQUENCIES; STIFFNESS; THIN FILMS;

MICROMACHINING;

EID: 4344669456     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.031     Document Type: Article

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