Three-dimensional dynamic environmental MEMS characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5458, Issue , 2004, Pages 1-8

  Novak, Erik ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

MEMS characterization; Optical profiler; Optical switch; Strobed interferometry; Surface profiling; White light interferometry

Indexed keywords

CHARACTERIZATION; CRYSTALLIZATION; FREQUENCIES; INTERFEROMETRY; NETWORKS (CIRCUITS); OPTICAL SWITCHES; POLYSILICON; SILICON; THREE DIMENSIONAL; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL SYSTEMS (MEMS) CHARACTERIZATION; OPTICAL PROFILERS; STROBED INTERFEROMETRY; SURFACE PROFILING; WHITE LIGHT INTERFEROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 10044268531     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546646     Document Type: Conference Paper

References (4)

1. E. Novak, F Pasop; "Optical Metrology for MEMS Characterization", Micro System Technologies 2003", Herbert Reichl editor,
2. J. Schmit, A. Olszak, "High-precision shape measurement by white-light interferometry with real-time scanner error correction," Appl. Opt. 41, pp 5943-5950, 2002
3. R. Gutierrez, K. Shcheglov, T Tang; "Interferometric system for precision imaging of vibrating structures," US Patent 6,291,145, 2001
4. C.R. Forest, P. Reynolds-Browne, O. Blum-Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter, and D. Adams; " Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation", not yet published