Parasitic effect on silicon MEMS resonator model parameters

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1363-1368

  Tanaka, Kazuaki ^a   Kihara, Ryuji ^a   Sánchez Amores, Ana ^b   Montserrat, Josep ^b   Esteve, Jaume ^b  

^a EPSON Europe Electronics GmbH   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Electrical equivalent circuit model; MEMS resonator; Parasitic effect

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; EQUIVALENT CIRCUITS; FREQUENCY RESPONSE; MEMS; SILICON;

ELECTRICAL EQUIVALENT CIRCUIT MODELS; MEMS RESONATORS; PARASITIC EFFECTS;

RESONATORS;

EID: 34247642227     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.209     Document Type: Article

References (8)

1. K. Tanaka et al., in: Proceedings of the 2001 IEICE General Conference, March 2001, C-12-29, p. 124.
2. A. Yajima et al., in: Proceedings of the 2001, Engineering Sciences Society, IEICE Conference, September 2001, C-2-15, p. 39.
3. Nguyen C.T.-C. IEEE Trans. Microwave Theory Tech. 47 August (1999) 1486-1503
4. C.T.-C. Nguyen, in: Proceedings of the 42nd Design Automation Conference, June 2005, pp. 416-420.
5. M.W. Putty, S.C. Chang, R.T. Howe, A.L. Robinson, and K.D. Wise, in: Proceedings of the IEEE Micro Electro Mechanical Systems, February 1989, pp. 60-65.
6. Lin Y.-W., Lee S., Li S.-S., Xie Y., Ren Z., and Nguyen C.T.-C. IEEE J. Solid State Circuits 39 December (2004) 2477-2491
7. Cho H., and Burk D.E. IEEE Trans. Electron. Devices 38 (1991) 1371-1375
8. Chowdhury S., Ahmadi M., and Miller W.C. J. Micromech. Microeng. 15 (2005) 756-763