Growth conditions and surface morphology of AlN MOVPE

Journal of Crystal Growth

Volumn 310, Issue 23, 2008, Pages 4935-4938

  Lobanova, A V ^a   Yakovlev, E V ^a   Talalaev, R A ^a   Thapa, S B ^b   Scholz, F ^b  

^a SOFT IMPACT LTD   (Russian Federation)

^b UNIVERSITY OF ULM   (Germany)

Author keywords

A1. AlN nanoparticles; A1. Computer simulation; A1. Surface morphology; A3. Metal organic vapor phase epitaxy; B1. AlN; B1. Nitrides

Indexed keywords

COMPUTATIONAL METHODS; CRYSTAL GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; NITRIDES; PHASE INTERFACES; RATE CONSTANTS; SURFACE ANALYSIS; VAPORS;

A1. ALN NANOPARTICLES; A1. COMPUTER SIMULATION; A1. SURFACE MORPHOLOGY; A3. METAL-ORGANIC VAPOR PHASE EPITAXY; B1. ALN; B1. NITRIDES;

SURFACE MORPHOLOGY;

EID: 56249147445     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.07.098     Document Type: Article

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