Annihilation mechanism of threading dislocations in AlN grown by growth form modification method using V/III ratio

Journal of Crystal Growth

Volumn 300, Issue 1, 2007, Pages 136-140

  Imura, Masataka ^a   Fujimoto, Naoki ^a   Okada, Narihito ^a   Balakrishnan, Krishnan ^a   Iwaya, Motoaki ^a   Kamiyama, Satoshi ^a   Amano, Hiroshi ^a   Akasaki, Isamu ^a   Noro, Tadashi ^b   Takagi, Takashi ^b   Bandoh, Akira ^c  

^a MEIJO UNIVERSITY   (Japan)

^b IBIDEN CO LTD   (Japan)

^c Showa Denko Materials Co   (Japan)

Author keywords

A1. TEM; A1. Threading dislocations; A1. V III ratio; A3. HT MOVPE; B1. AIN

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; GRAIN SIZE AND SHAPE; METALLORGANIC VAPOR PHASE EPITAXY; TRANSMISSION ELECTRON MICROSCOPY;

HT-MOVPE; THREADING DISLOCATIONS; V/III RATIO;

DISLOCATIONS (CRYSTALS);

EID: 33847302341     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.11.013     Document Type: Article

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