메뉴 건너뛰기




Volumn 52, Issue 12, 2008, Pages 1854-1860

Modeling the equivalent oxide thickness of Surrounding Gate SOI devices with high-κ insulators

Author keywords

EOT; GAA; High ; MuG; SGT; SOI

Indexed keywords

CAPACITANCE; METAL INSULATOR BOUNDARIES; QUANTUM ELECTRONICS; QUANTUM THEORY;

EID: 56049120526     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2008.06.059     Document Type: Article
Times cited : (36)

References (17)
  • 2
    • 0032187666 scopus 로고    scopus 로고
    • Generalized scale length for two-dimensional effects in MOSFET's
    • Frank D., Taur Y., and Wong H. Generalized scale length for two-dimensional effects in MOSFET's. IEEE Electron Dev Lett 19 10 (1998) 365-387
    • (1998) IEEE Electron Dev Lett , vol.19 , Issue.10 , pp. 365-387
    • Frank, D.1    Taur, Y.2    Wong, H.3
  • 3
    • 31744439912 scopus 로고    scopus 로고
    • Huff H.R., and Gilmer D.C. (Eds), Springer
    • In: Huff H.R., and Gilmer D.C. (Eds). High dielectric constant materials (2004), Springer
    • (2004) High dielectric constant materials
  • 4
    • 6344290643 scopus 로고
    • Calculated threshold-voltage characteristics of an XMOS transistor having an additional bottom gate
    • Sekigawa T., and Hayashi Y. Calculated threshold-voltage characteristics of an XMOS transistor having an additional bottom gate. Solid State Electron 27 (1984) 827-828
    • (1984) Solid State Electron , vol.27 , pp. 827-828
    • Sekigawa, T.1    Hayashi, Y.2
  • 5
    • 0024918341 scopus 로고
    • A fully depleted lean-channel transistor (DELTA) - a novel vertical ultra thin SOI MOSFET
    • Hisamoto D., Kaga T., Kawamoto Y., and Takeda E. A fully depleted lean-channel transistor (DELTA) - a novel vertical ultra thin SOI MOSFET. Tech Dig IEDM (1989) 833
    • (1989) Tech Dig IEDM , pp. 833
    • Hisamoto, D.1    Kaga, T.2    Kawamoto, Y.3    Takeda, E.4
  • 7
    • 0026909715 scopus 로고
    • Numerical analysis of a cylindrical thin-pillar transistor (CYNTHIA)
    • Miyano S., Hirose M., and Masuoka F. Numerical analysis of a cylindrical thin-pillar transistor (CYNTHIA). IEEE Trans Electron Dev 39 8 (1992) 1876
    • (1992) IEEE Trans Electron Dev , vol.39 , Issue.8 , pp. 1876
    • Miyano, S.1    Hirose, M.2    Masuoka, F.3
  • 8
    • 1442360362 scopus 로고    scopus 로고
    • Multiple-gate SOI MOSFETs
    • Colinge J.P. Multiple-gate SOI MOSFETs. Solid State Electron 48 60 (2004) 897-905
    • (2004) Solid State Electron , vol.48 , Issue.60 , pp. 897-905
    • Colinge, J.P.1
  • 9
    • 41149171855 scopus 로고    scopus 로고
    • Kavalieros J et al. Tri-Gate transistor architecture with high-κ gate dielectrics, metal gates and strain engineering. In: 2006 Symp. on VLSI Tech.; 2006.
    • Kavalieros J et al. Tri-Gate transistor architecture with high-κ gate dielectrics, metal gates and strain engineering. In: 2006 Symp. on VLSI Tech.; 2006.
  • 10
    • 1842865595 scopus 로고    scopus 로고
    • Accurate modeling of gate capacitance in deep submicron MOSFETs with high-κ gate-dielectrics
    • Hakim M.M.A., and Haque A. Accurate modeling of gate capacitance in deep submicron MOSFETs with high-κ gate-dielectrics. Solid State Electron 48 (2004) 1095-1100
    • (2004) Solid State Electron , vol.48 , pp. 1095-1100
    • Hakim, M.M.A.1    Haque, A.2
  • 11
    • 33846639145 scopus 로고    scopus 로고
    • 2) gate dielectrics in double-gate and cylindrical-nanowire FETs scaled to the ultimate technology nodes
    • 2) gate dielectrics in double-gate and cylindrical-nanowire FETs scaled to the ultimate technology nodes. IEEE Trans Nanotech 6 1 (2007) 90-96
    • (2007) IEEE Trans Nanotech , vol.6 , Issue.1 , pp. 90-96
    • Gnani, E.1    Reggiani, S.2    Rudan, M.3    Baccarani, G.4
  • 12
    • 0035278985 scopus 로고    scopus 로고
    • Understanding the effects of wave function penetration on the inversion layer capacitance of NMOSFETs
    • Mudanai S., Register L.F., Tasch A.F., and Banerjee S.K. Understanding the effects of wave function penetration on the inversion layer capacitance of NMOSFETs. IEEE Trans Electron Dev 22 3 (2001) 145-147
    • (2001) IEEE Trans Electron Dev , vol.22 , Issue.3 , pp. 145-147
    • Mudanai, S.1    Register, L.F.2    Tasch, A.F.3    Banerjee, S.K.4
  • 14
    • 38149018536 scopus 로고    scopus 로고
    • Comprehensive study of the corner effects in Pi-Gate MOSFETs including quantum effects
    • García-Ruiz F.J., Godoy A., Gámiz F., Sampedro C., and Donetti L.A. Comprehensive study of the corner effects in Pi-Gate MOSFETs including quantum effects. IEEE Trans Electron Dev 54 12 (2007) 3369-3377
    • (2007) IEEE Trans Electron Dev , vol.54 , Issue.12 , pp. 3369-3377
    • García-Ruiz, F.J.1    Godoy, A.2    Gámiz, F.3    Sampedro, C.4    Donetti, L.A.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.