Iterative Feedforward Compensation of Hysteresis in Piezo Positioners

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2003, Pages 2626-2631

  Leang, Kam K ^a   Devasia, Santosh ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CONVERGENCE OF NUMERICAL METHODS; ERROR ANALYSIS; HYSTERESIS; ITERATIVE METHODS; NONLINEAR CONTROL SYSTEMS; SENSORS; SET THEORY;

ITERATIVE CONTROL ALGORITHMS (ICA); SCANNING PROBE MICROSCOPY (SPM);

POSITION CONTROL;

EID: 1542318926     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/CDC.2003.1273019     Document Type: Conference Paper

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