Control of the Nanopositioning Devices

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2003, Pages 2644-2649

  Salapaka, Srinivasa ^a   Sebastian, Abu ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Iowa State University of Science and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; CONTROL THEORY; DEFORMATION; ELECTRIC FIELD EFFECTS; OPTICAL SENSORS; PIEZOELECTRIC DEVICES; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR MATERIALS; X RAY MICROSCOPES;

NANOPOSITIONING DEVICES; X-RAY MICROSCOPES;

NANOTECHNOLOGY;

EID: 1542318929     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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