SCOPUS 정보 검색 플랫폼

Volumn 19, Issue SUPPL. 1, 2008, Pages

Initial process effects on the surface morphology and structural property of the AlN epilayers

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; INITIAL PROCESS; METAL-ORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE SUBSTRATES; TRIMETHYL ALUMINUM;

ALUMINA; ALUMINUM COMPOUNDS; CORUNDUM; EPILAYERS; EPITAXIAL GROWTH; NITRIDES; ORGANIC CHEMICALS; ORGANIC COMPOUNDS; ORGANOMETALLICS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 53649109398 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-008-9682-5 Document Type: Article

Times cited : (5)

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