Complex refractive indices of Cd x Zn 1-x O thin films grown by molecular beam epitaxy

Journal of Electronic Materials

Volumn 37, Issue 11, 2008, Pages 1665-1673

  Mares, J W ^a   Falanga, M ^a   Folks, W R ^a   Boreman, G ^a   Osinsky, A ^b   Hertog, B ^b   Xie, J Q ^b   Schoenfeld, W V ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b SVT ASSOCIATES   (United States)

Author keywords

Cadmium zinc oxide; Ellipsometry; Optical constants; Refractive index; Spectrophotometry; Wide bandgap semiconductors

Indexed keywords

CADMIUM ZINC OXIDE; ELLIPSOMETRY; OPTICAL CONSTANTS; SPECTROPHOTOMETRY; WIDE-BANDGAP SEMICONDUCTORS;

LIGHT MEASUREMENT; LIGHT REFRACTION; REFRACTIVE INDEX; REFRACTOMETERS;

OPTICAL PROPERTIES;

EID: 53149093177     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-008-0527-z     Document Type: Article

References (62)

1. G. Carlotti, G. Socino, and E. Verona, Proc. of the IEEE Ultrasonics Symposium (1988, vol. 1), 427 p.
2. V. Gulia S. Kumar 2007 Opt. Mater. 29 778 10.1016/j.optmat.2005.12.007
3. H. Sasaki K. Tsubouchi N. Chubachi N. Mikoshiba 1976 J. Appl. Phys. 47 2046 10.1063/1.322933
4. T. Shiosaki A. Kawabata 1974 Appl. Phys. Lett. 25 10 10.1063/1.1655257
5. J. Dong A. Osinsky B. Hertog A. Dabiran P. Chow Y. Heo D. Norton S. Pearton 2005 J. Electron. Mater. 34 416 10.1007/s11664-005-0121-6
6. T. Gruber C. Kirchner R. Kling F. Reuss A. Waag 2004 Appl. Phys. Lett. 84 5359 10.1063/1.1767273
7. K. Koike, K. Hama, I. Nakashima, S. Sasa, M. Inoue, and M. Yano, Jpn. J. Appl. Phys. 1 44, 3822 (2005).
8. A. Osinsky, J. Dong, J.Q. Xie, B. Hertog, A. Dabiran, P.P. Chow, S.J. Pearton, D.P. Norton, D.C. Look, W.V. Schoenfeld, O. Lopatiuk, L. Chernyak, M. Cheung, A.N. Cartwright, and M. Gerhold, MRS Symp. Proc. 892, 429 (2006).
9. S. Sadofev S. Blumstengel J. Cui J. Puls S. Rogaschewski P. Schafer F. Henneberger 2006 Appl. Phys. Lett. 89 201907 10.1063/1.2388250
10. D.C. Look 2001 Mater. Sci. Eng. B-Solid 80 383
11. U. Ozgur, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.J. Cho, and H. Morkoc, J. Appl. Phys. 98, 1 (2005). doi: 10.1063/1.1992666.
12. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, and Y. Sugimoto, Jpn. J. Appl. Phys. 2 35, L74 (1996).
13. J.W. Orton C.T. Foxon 1998 Rep. Prog. Phys. 61 1 10.1088/0034-4885/61/1/ 001
14. D.C. Look D.C. Reynolds J.R. Sizelove R.L. Jones C.W. Litton G. Cantwell W.C. Harsch 1998 Solid State Commun. 105 399 10.1016/S0038-1098(97)10145-4
15. J.-J. Chen F. Ren D.P. Norton S.J. Pearton A. Osinsky J.W. Dong S.N.G. Chu 2005 Electrochem. Solid St. 8 G359 10.1149/1.2119447
16. N.B. Chen C.H. Sui 2006 Mater. Sci. Eng. B-Solid 126 16
17. T.S. Jeong M.S. Han J.H. Kim S.J. Bae C.J. Youn 2007 J. Phys. D Appl. Phys. 40 370 10.1088/0022-3727/40/2/013
18. T. Makino Y. Segawa M. Kawasaki A. Ohtomo R. Shiroki K. Tamura T. Yasuda H. Koinuma 2001 Appl. Phys. Lett. 78 1237 10.1063/1.1350632
19. M.R.J.K.R. Thangavel, Phys. Status Solidi B 244, 3183 (2007). doi: 10.1002/pssb.200743097.
20. Y.R. Ryu T.S. Lee J.A. Lubguban A.B. Corman H.W. White J.H. Leem M.S. Han Y.S. Park C.J. Youn W.J. Kim 2006 Appl. Phys. Lett. 88 052103 10.1063/1.2168040
21. T. Gruber C. Kirchner R. Kling F. Reuss A. Waag F. Bertram D. Forster J. Christen M. Schreck 2003 Appl. Phys. Lett. 83 3290 10.1063/1.1620674
22. X.J. Wang I.A. Buyanova W.M. Chen M. Izadifard S. Rawal D.P. Norton S.J. Pearton A. Osinsky J.W. Dong A. Dabiran 2006 Appl. Phys. Lett. 89 151909 10.1063/1.2361081
23. K. Postava H. Sueki M. Aoyama T. Yamaguchi C. Ino Y. Igasaki M. Horie 2000 J. Appl. Phys. 87 7820 10.1063/1.373461
24. X.W. Sun H.S. Kwok 1999 J. Appl. Phys. 86 408 10.1063/1.370744
25. C.W. Teng J.F. Muth U. Ozgur M.J. Bergmann H.O. Everitt A.K. Sharma C. Jin J. Narayan 2000 Appl. Phys. Lett. 76 979 10.1063/1.125912
26. C. Bundesmann A. Rahm M. Lorenz M. Grundmann M. Schubert 2006 J. Appl. Phys. 99 113504 10.1063/1.2200447
27. N.B. Chen H.Z. Wu T.N. Xu 2005 J. Appl. Phys. 97 023515 10.1063/1.1821633
28. R. Schmidt B. Rheinlander M. Schubert D. Spemann T. Butz J. Lenzner E.M. Kaidashev M. Lorenz A. Rahm H.C. Semmelhack M. Grundmann 2003 Appl. Phys. Lett. 82 2260 10.1063/1.1565185
29. R. Schmidt-Grund A. Carstens B. Rheinlander D. Spemann H. Hochmut G. Zimmermann M. Lorenz M. Grundmann 2006 J. Appl. Phys. 99 123701 10.1063/1.2205350
30. R. Schmidt-Grund M. Schubert B. Rheinlander D. Fritsch H. Schmidt E.M. Kaidashev M. Lorenz C.M. Herzinger M. Grundmann 2004 Thin Solid Films 455-456 500 10.1016/j.tsf.2003.11.249
31. D.J. Channin J.M. Hammer M.T. Duffy 1975 Appl. Opt. 14 923
32. E.J. Ibanga, C. Le Luyer, and J. Mugnier. Mater. Chem. Phys. 80, 490 (2003). doi: 10.1016/S0254-0584(02)00552-7.
33. C.L. Jia K.M. Wang X.L. Wang X.J. Zhang F. Lu 2005 Opt. Exp. 13 5093 10.1364/OPEX.13.005093
34. M.H. Koch P.Y. Timbrell R.N. Lamb 1995 Semicond. Sci. Tech. 10 1523 10.1088/0268-1242/10/11/015
35. K. Ellmer 2001 J. Phys. D Appl. Phys. 34 3097 10.1088/0022-3727/34/21/301
36. J.H. Lee K.H. Ko B.O. Park 2003 J. Cryst. Growth 247 119 10.1016/S0022-0248(02)01907-3
37. X. Wu T.J. Coutts W.P. Mulligan 1997 J. Vac. Sci. Technol. A 15 1057 10.1116/1.580429
38. Y.S. Park C.W. Litton T.C. Collins D.C. Reynolds 1966 Phys. Rev. 143 512 10.1103/PhysRev.143.512
39. D.C. Reynolds T.C. Collins 1969 Phys. Rev. 185 1099 10.1103/PhysRev.185. 1099
40. H.D. Li S.F. Yu S.P. Lau E.S.P. Leong H.Y. Yang T.P. Chen A.P. Abiyasa C.Y. Ng 2006 Adv. Mater. 18 771 10.1002/adma.200501693
41. S.K. Hong H.J. Ko Y. Chen T. Hanada T. Yao 2000 J. Vac. Sci. Technol. B 18 2313 10.1116/1.1303809
42. A. Nakamura, J. Ishihara, S. Shigemori, K. Yamamoto, T. Aoki, H. Gotoh, and J. Temmyo, Jpn. J. Appl. Phys. 2 43, L1452 (2004).
43. S. Shigemori, A. Nakamura, J. Ishihara, T. Aoki, and J. Temmyo, Jpn. J. Appl. Phys. 2 43, L1088 (2004).
44. C.W. Sun P. Xin C.Y. Ma Z.W. Liu Q.Y. Zhang Y.Q. Wang Z.J. Yin S. Huang T. Chen 2006 Appl. Phys. Lett. 89 181923 10.1063/1.2378527
45. Z. Ye D. Ma J. He J. Huang B. Zhao X. Luo Z. Xu 2003 J. Cryst. Growth 256 78 10.1016/S0022-0248(03)01314-9
46. S. Choopun R.D. Vispute W. Yang R.P. Sharma T. Venkatesan 2002 Appl. Phys. Lett. 80 1529 10.1063/1.1456266
47. J.W. Mares F.R. Ruhge A.V. Thompson P.G. Kik A. Osinsky B. Hertog A.M. Dabiran P.P. Chow W.V. Schoenfeld 2007 Opt. Mater. 30 346 10.1016/j.optmat.2006. 11.058
48. A.B. Djurisic 1998 Opt. Commun. 151 147 10.1016/S0030-4018(98)00122-9
49. E. Eberbach, Biosystems 82, 1 (2005). doi: 10.1016/j.biosystems.2005.05. 006.
50. S. Jurecka M. Jurechova J. Mullerova 2003 Acta Phys. Slovaca. 53 215
51. J.H. Holland 1962 J. Assoc. Comput. Mach. 9 297 10.1145/321127.321128
52. I. Rechenberg, ed., Cybernetic Solution Path of an Experimental Problem (Farnborough: Royal Aircraft Establishment, 1965), Library Translation No. 1122.
53. A.R. Forouhi I. Bloomer 1986 Phys. Rev. B 34 7018 10.1103/PhysRevB.34. 7018
54. A.R. Forouhi I. Bloomer 1988 Phys. Rev. B 38 1865 10.1103/PhysRevB.38. 1865
55. D. Poelman P.F. Smet 2003 J. Phys. D Appl. Phys. 36 1850 10.1088/0022-3727/36/15/316
56. H.G. Tompkins and E.A. Irene, eds., Handbook of Ellipsometry (New York: William Andrew Publishing Inc., 2005).
57. H.G. Tompkins, S. Tasic, J. Baker, and D. Convey, Surf. Interface Anal. 29, 179 (2000). doi :10.1002/(SICI)1096-9918 (200003)29:3<179::AID- SIA701>3.0.CO;2-O.
58. J.A. Woollam, B. Johs, C.M. Herzinger, J. Hilfiker, R. Synowicki, and C.L. Bungay, Proc. SPIE CR72, 29 (1999).
59. N. Antoine-Vincent F. Natali M. Mihailovic A. Vasson J. Leymarie P. Disseix D. Byrne F. Semond J. Massies 2003 J. Appl. Phys. 93 5222 10.1063/1.1563293
60. M.J. Bergmann U. Ozgur J.H.C. Casey H.O. Everitt J.F. Muth 1999 Appl. Phys. Lett. 75 67 10.1063/1.124278
61. A.B. Djurisic E.H. Li 2001 J. Appl. Phys. 89 273 10.1063/1.1331069
62. U. Ozgur G. Webb-Wood 2001 Appl. Phys. Lett. 79 4103 10.1063/1.1426270