Formation of c-axis oriented ZnO optical waveguides by radio-frequency magnetron sputtering

Optics Express

Volumn 13, Issue 13, 2005, Pages 5093-5099

  Jia, Chuan Lci ^a   Wang, Kc Ming ^a   Wang, Xue Lin ^a   Zhang, Xi Jian ^a   Lu, Fei ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LITHIUM COMPOUNDS; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL PROPERTIES; SPECTROPHOTOMETERS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAYS; ZINC OXIDE;

BUFFER LAYERS; OPTICAL QUALITY; THIN FILMS, OPTICAL PROPERTIES; WAVEGUIDE LOSSES;

OPTICAL WAVEGUIDES;

EID: 22744455314     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.005093     Document Type: Article

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