Advances in nanoimprint lithography

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Volumn , Issue , 2007, Pages 1179-1184

  Lugli, Paolo ^a,b   Harrer, Stefan ^b   Strobel, Sebastian ^c   Brunetti, Francesca ^b,d   Scarpa, Giuseppe ^b   Tornow, Marc ^e   Abstreiter, Gerhard ^d  

^a IEEE

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^c WALTER SCHOTTKY INSTITUT   (Germany)

^d UNIVERSITY OF ROME TOR VERGATA   (Italy)

^e TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Isothermal imprint; Nanofabrication; Nanoimprint lithography; Room temperature nanoimprint lithography

Indexed keywords

ELECTRONICS ENGINEERING; NANOTECHNOLOGY; PAINTING; TECHNOLOGY;

HIGH THROUGHPUTS; INTERNATIONAL CONFERENCES; ISOTHERMAL IMPRINT; NANO IMPRINTS; NANO-IMPRINTING; NANOFABRICATION; RECENT PROGRESS; ROOM TEMPERATURES; ROOM-TEMPERATURE NANOIMPRINT LITHOGRAPHY;

NANOIMPRINT LITHOGRAPHY;

EID: 52949154341     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2007.4601394     Document Type: Conference Paper

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