Simultaneous in situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method

Journal of Applied Physics

Volumn 79, Issue 1, 1996, Pages 104-109

  Shiratani, Masaharu ^a   Kawasaki, Hiroharu ^a   Fukuzawa, Tsuyoshi ^a   Yoshioka, Takashi ^a   Ueda, Yoshio ^a   Singh, Sanjay ^a   Watanabe, Yukio ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CALCULATIONS; CHARGED PARTICLES; LASER APPLICATIONS; NUCLEATION; OPTICAL VARIABLES MEASUREMENT; PLASMAS; SCANNING ELECTRON MICROSCOPY; SILANES;

COUNT MEDIAN DIAMETERS; LOGNORMAL SIZE DISTRIBUTION; MIE SCATTERING THEORY; POLARIZATION SENSITIVE LASER LIGHT SCATTERING;

LIGHT SCATTERING;

EID: 0029770344     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360916     Document Type: Article

References (30)