Analysis of Langmuir probe data: analytical parametrization, and the importance of the end effect

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 1, 2001, Pages 376-378

  Steinbruchel Ch ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; IONS; PARAMETER ESTIMATION; PLASMA DENSITY; PLASMAS;

END EFFECT; ION CURRENT; ION FLUX; LANGMUIR PROBE; PARAMETRIZATION;

PROBES;

EID: 0035101059     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1326936     Document Type: Article

References (2)

1. Z. C. Lu, J. E. Foster, T. G. Snodgrass, J. H. Booske, and A. E. Wendt, J. Vac. Sci. Technol. A 17, 840 (1999).
2. T. Kimura, K. Kaga, and K. Ohe, Jpn. J. Appl. Phys., Part 1 39, 1351 (2000).