Ion distribution functions in inductively coupled radio frequency discharges in argon-chlorine mixtures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 3015-3023

  Woodworth, J R ^a   Riley, M E ^a   Miller, P A ^a   Nichols, C A ^a   Hamilton, T W ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Applied Physics International   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; CURRENT DENSITY; ELECTRODES; IONS; MIXTURES; PLASMA DENSITY;

ANGULAR DISTRIBUTION; ION DISTRIBUTION FUNCTION; ION ENERGY; LANGMUIR PROBE MEASUREMENT;

ELECTRIC DISCHARGES;

EID: 0031271928     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580898     Document Type: Article

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