Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor

Applied Physics A: Materials Science and Processing

Volumn 93, Issue 2, 2008, Pages 439-442

  Takeguchi, M ^a   Shimojo, M ^a   Furuya, K ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b SAITAMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL IMPURITIES; ELECTRON BEAMS; ELECTRONS; NANOWIRES; PHOSPHORUS; PLATINUM; PLATINUM COMPOUNDS; SINGLE CRYSTALS;

AMORPHOUS NANOWIRES; AMORPHOUS PHASE; ELECTRON BEAM IRRADIATION; ELECTRON BEAM-INDUCED DEPOSITION; LARGE GRAIN SIZES; MOLYBDENUM FILMS; PHOSPHORUS CONTENTS; POST-DEPOSITION;

DEPOSITION;

EID: 51649130358     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4851-1     Document Type: Article

References (20)

1. H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, K.L. Lee, Jpn. J. Appl. Phys. 33, 7099 (1994)
2. I. Utke, A. Luisier, P. Hoffmann, D. Laub, P.A. Buffar, Appl. Phys. Lett. 81, 3245 (2002)
3. W.F. van Dorp, B. van Someren, C.W. Hagen, P. Kruit, P.A. Crozier, Nano Lett. 5, 1303 (2005)
4. K. Mitsuishi, M. Shimojo, M. Han, K. Furuya, Appl. Phys. Lett. 83, 2064 (2003)
5. M. Takeguchi, M. Shimojo, K. Furuya, Nanotechnology 16, 1321 (2005)
6. M. Shimojo, K. Mitsuishi, A. Tameike, K. Furuya, J. Vac. Sci. Technol. B 22, 742 (2004)
7. W.F. van Dorp, B. van Someren, C.W. Hagen, P. Kruit, P. Crozier, Nano Lett. 5, 1303 (2005)
8. Z.Q. Liu, K. Mitsuishi, K. Furuya, J. Appl. Phys. 96, 61 (2004)
9. M. Han, K. Mitsuishi, M. Shimojo, K. Furuya, Philos. Mag. 84, 1281 (2004)
10. M. Shimojo, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya, Appl. Phys. A 79, 1869 (2004)
11. M. Takeguchi, M. Shimojo, K. Furuya, Jpn. J. Appl. Phys. 44, 5631 (2005)
12. H.W.P. Koops, J. Kretz, M. Rudolphm, M. Weber, J. Vac. Sci. Technol. B 11, 2386 (1993)
13. M. Takeguchi, M. Shimojo, M. Tanaka, R. Che, W. Zhang, K. Furuya, Surf. Interface Anal. 38, 1628 (2006)
14. M. Shimojo, M. Takeguchi, R. Che, W. Zhang, M. Takana, K. Mitsuishi, K. Furuya, Jpn. J. Appl. Phys. 45, 5509 (2006)
15. M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya, J. Phys. Conf. Ser. 100, 052016 (2008)
16. T. Ichihashi, S. Matsui, J. Vac. Sci. Technol. B 6, 1869 (1988)
17. I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon, P. Doppelt, J. Vac. Sci. Technol. B 18, 3168 (2000)
18. J.D. Barry, M. Evin, J. Molstad, A. Wickenden, T. Brintlinger, J. Vac. Sci. Technol. B 24, 3165 (2006)
19. S. Wang, Y.-M. Sum, Q. Wang, J.M. White, J. Vac. Sci. Technol. B 22, 1803 (2004)
20. M.H. Ervin, D. Chang, B. Nichols, A. Wickenden, J. Barry, J. Melngailis, J. Vac. Sci. Technol. B 25, 2250 (2007)