Formation of nanoscale platinum and iron oxide structures using electron beam induced deposition techniques

Journal of Physics: Conference Series

Volumn 100, Issue PART 5, 2008, Pages

  Shimojo, M ^a,b   Takeguchi, M ^a   Mitsuishi, K ^a   Tanaka, M ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b SAITAMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; DEPOSITION; DEPOSITS; ELECTRON BEAMS; ELECTRONS; IRON; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; ORGANOMETALLICS; PLATINUM; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CARBON CONTAMINATION; ELECTRON BEAM-INDUCED DEPOSITION; FOCUSED ELECTRON BEAMS; GAS-INTRODUCTION SYSTEMS; IRON PENTACARBONYLS; ORGANOMETALLIC PRECURSORS; POSTDEPOSITION HEAT TREATMENT; TEM OBSERVATIONS;

IRON OXIDES;

EID: 77954317568     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/5/052016     Document Type: Conference Paper

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