A high sensitivity force sensor for microassembly: Design and experiments

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 2, Issue , 2003, Pages 703-708

  Shen, Yantao ^a   Xi, Ning ^a   Li, Wen Jung ^b   Tan, Jindong ^c  

^a Michigan State University   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^c Michigan Technological University   (United States)

Author keywords

Adhesives; Assembly; Calibration; Electronics packaging; Force sensors; Microassembly; Monitoring; Optical microscopy; Optical sensors; Surface tension

Indexed keywords

ADHESIVES; ASSEMBLY; CALIBRATION; DATA HANDLING; ELECTRONICS PACKAGING; IMAGE PROCESSING; MONITORING; OPTICAL DATA PROCESSING; OPTICAL MICROSCOPY; OPTICAL SENSORS; SURFACE TENSION;

AUTOMATED MANUFACTURING PROCESS; DATA PROCESSING TECHNIQUES; FORCE SENSOR; MICRO ASSEMBLY; MICRO MANIPULATION; PACKAGING PROCESS; PIEZOELECTRIC FORCE; POLYVINYLIDENE FLUORIDES;

INTELLIGENT MECHATRONICS;

EID: 84943428091     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2003.1225429     Document Type: Conference Paper

References (10)

1. S. K. Koelemijer Chollet, L. Benmayor, J.-M. Uehlinger and J. Jacot, Cost Effective Micro-System Assembly Automation, Emerging Technologies and Factory Automation. Proceedings. ETFA '99. Vol. 1, pp. 359-366, 1999.
2. M. Carrozza, A. Eisinberg, A. Menciassi, D. Campolo, S. Micera and P. Dario, Towards a Force-controlled Microgripper for Assembling Biomedical Microdevices, Journal of Micromech. Microeng. Vol. 10, pp. 271-276, 2000.
3. W. Zesch and R. Fearing, Alignment of Microparts Using Force Controlled Pushing, SPIE Conference on Microrobotics and Micromanipulation, 1998.
4. S. Fahlbush and S. Fatikow, Micro Force Sensing in a Micro Robotic System, ICRA01, pp. 3435-3440, 2001.
5. D. Kleinke and H. Uras, A Magnetostrictive Force Sensor, Reivew of Science Instrument. Vol. 65, no. 5, pp. 1699-1710, 1994.
6. R. Peters, Symmetric differential capacitive pressure sensor, Reivew of Science Instrument. Vol. 64, no. 8, pp. 2256-2261, 1993.
7. B. Nelson, Y. Zhou and B. Vikramaditya, Sensor-based micro-assembly of hybrid MEMS devices, IEEE Control System Magazine. Vol. 18, no.6 pp. 35-45, 1998.
8. C. Lee, T. Itoh and R. Suga, Micromachined Piezoelectric Force Sensors Based on PZT Thin Films, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. Vol. 43, no. 4, pp. 553-559, 1996.
9. C. K. M. Fung, I. Elhajj, W. J. Li, and N. Xi A 2-D PVDF Force Sensing System for Micro-manipulation and Micro-assembly, ICRA02, pp. 1489-1494, 2002
10. C. K. M. Fung, W. J. Li, I. Elhajj, and N. Xi Internet-Based Remote Sensing and Manipulation in Micro Environment, 2001 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Vol. 2, pp. 695-700, 2001.