Si multiprobes integrated with lateral actuators for independent scanning probe applications

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1224-1229

  Ahn, Yoomin ^a   Ono, Takahito ^b   Esashi, Masayoshi ^b  

^a Hanyang University   (South Korea)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; INDUCTIVELY COUPLED PLASMA; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ANISOTROPIC ETCHING; MICROFABRICATION; MULTIPROBES; SCANNING PROBE MICROSCOPY (SPM);

PROBES;

EID: 18744401337     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/012     Document Type: Article

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