Grayscale patterning of polymer thin films with nanometer precision by direct-write multiphoton photolithography

Langmuir

Volumn 24, Issue 16, 2008, Pages 8939-8943

  Xiao, Yao ^a   Ito, Takashi ^a   Higgins, Daniel A ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRAY SCALING; MULTI-PHOTON;

ABS RESINS; CORUNDUM; ETHYLENE; LITHOGRAPHY; PULSED LASER DEPOSITION; STYRENE; THICK FILMS; THIN FILMS;

LASERS;

FUSED HETEROCYCLIC RINGS; NANOMATERIAL; POLY(3,4 ETHYLENE DIOXYTHIOPHENE); POLY(3,4-ETHYLENE DIOXYTHIOPHENE); POLYMER; POLYSTYRENE DERIVATIVE; POLYSTYRENESULFONIC ACID;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; PHOTON; ULTRASTRUCTURE;

BICYCLO COMPOUNDS, HETEROCYCLIC; MICROSCOPY, ATOMIC FORCE; NANOSTRUCTURES; PHOTONS; POLYMERS; POLYSTYRENES;

EID: 50849132204     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la8008877     Document Type: Article

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