High-resolution direct-write multiphoton photolithography in poly(methylmethacrylate) films

Applied Physics Letters

Volumn 88, Issue 18, 2006, Pages

  Higgins, Daniel A ^a   Everett, Thomas A ^a   Xie, Aifang ^a   Forman, Sarah M ^a   Ito, Takashi ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL MICROELECTRODES; MULTIPHOTON PHOTOLITHOGRAPHY; POLY(METHYLMETHACRYLATE) FILMS;

CHROMOPHORES; ETCHING; EVAPORATION; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; THIN FILMS;

MULTIPHOTON PROCESSES;

EID: 33646536124     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2200476     Document Type: Article

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