High speed gray scale laser direct write technology for micro-optic fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4984, Issue , 2003, Pages 210-218

  Tamkin, John M ^a   Bagwell, Brett ^a   Kimbrough, Brad ^a   Jabbour, Ghassan ^a   Descour, Michael ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Laser direct write; Micro optics; Raster scanning

Indexed keywords

OPTICAL DEVICES; PHOTOSENSITIVITY; SCANNING; ULTRAVIOLET RADIATION;

MICROOPTICS FABRICATION;

LASER OPTICS;

EID: 0037719968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472908     Document Type: Conference Paper

References (7)

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