Electrical characteristics of Ti-doped Ta2O5 stacked capacitors

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8684-8692

  Atanassova, E ^a   Spassov, D ^a   Paskaleva, A ^a   Georgieva, M ^a   Koprinarova, J ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

Capacitors; Doping; Electrical measurements; High dielectric constant stacks; Titanium doped tantalum oxide

Indexed keywords

CAPACITORS; DOPING; ELECTRICAL CHARACTERISTICS; ELECTRICAL MEASUREMENTS; HIGH-DIELECTRIC CONSTANT STACKS; TITANIUM DOPED TANTALUM OXIDE;

TANTALUM;

EID: 50849105742     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.05.003     Document Type: Article

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