Study on In-Zn-Sn-O and In-Sn-Zn-O films deposited on PET substrate by magnetron co-sputtering system

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5718-5723

  Lee, D Y ^a   Lee, J R ^a   Lee, G H ^b   Song, P K ^a  

^a Pusan National University   (South Korea)

^b Korea Institute of Material Science   (South Korea)

Author keywords

73.61; Dynamic bending test; Flexible substrate; In Sn Zn O; In Zn Sn O; Magnetron co sputtering

Indexed keywords

ATOMIC PHYSICS; ATOMS; ELECTRON TUBES; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; PLASTIC BOTTLES; POSITRON ANNIHILATION SPECTROSCOPY; POSITRON EMISSION TOMOGRAPHY; THERMOPLASTICS; TIN; TIN ALLOYS; ZINC ALLOYS;

73.61; CARRIER-GENERATION; CO-SPUTTERING; DYNAMIC BENDING TEST; FLEXIBLE SUBSTRATE; IN-SN-ZN-O; IN-ZN-SN-O; MAGNETRON CO-SPUTTERING; MORPHOLOGY AND MECHANICAL PROPERTIES; PET SUBSTRATE; POLYETHYLENE TEREPHTHALATE; ROOM TEMPERATURES; ZN ATOMS; ZN CONTENT;

ZINC;

ALLOY; ATOMS; BOTTLES; CATHODES; DEPOSITION; INDIUM COMPOUNDS; MECHANICAL PROPERTIES; PLASTIC CONTAINERS; POLYETHYLENE TEREPHTHALATE; SPECTROCHEMICAL ANALYSIS; TEMPERATURE CONTROL; THERMOPLASTICS; THIN FILMS; TIN COMPOUNDS; ZINC COMPOUNDS;

EID: 50349086588     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.091     Document Type: Article

References (21)

1. Kim D.H., Park M.R., and Lee G.H. Surf. Coat. Technol. 201 (2006) 927
2. Betz U., Kharrazi Olsson M., Marthy J., Escola M.F., and Atarmny F. Surf. Coat. Technol. 200 (2006) 5751
3. Kim H.M., Jung S.K., Ahn J.S., Kang Y.J., and Je K.C. Jpn. J. Appl. Phys. 42 (2003) 223
4. Lee J.R., Kim D.G., Lee G.H., Park Y.H., and Song P.K. Met. Mater. Int. 13 (2007) 399
5. Sasabayashi T., Ito N., Nishimura E., Kon M., Song P.K., Utsumi K., Kaijo A., and Shigesato Y. Thin Solid Films 445 (2003) 219
6. Ito N., Sato Y., Song P.K., Kaijio A., Inoue K., and Shigesato Y. Thin Solid Films 496 (2006) 99
7. Song P.K., Shigesato Y., Kamei M., and Yasui I. Jpn. J. Appl. Phys. 38 (1999) 2921
8. Liu D.S., Lin C.H., Huang B.W., and Wu C.C. Jpn. J. Appl. Phys. 4B 45 (2006) 3526
9. Liu D.S., Wu C.C., and Lee C.T. Jpn. J. Appl. Phys. 7A 44 (2005) 5119
10. Ow-Yang C.W., Yeom H.Y., and Paine D.C. Thin Solid Films 516 (2008) 3105
11. Bae J.H., Moon J.M., Jeong S.W., Kim J.J., Kang J.W., Kim D.G., Kim J.K., Park J.W., and Kim H.K. J. Electro. Soc. 155 (2008) 11
12. Woo B.J., Hong J.S., Kim S.T., Kim H.M., Park S.H., and Kim J.J. J. Korean Phys. Soc. 48 (2006) 1579
13. Minami T., Yamamoto T., Toda Y., and Miyata T. Thin Solid Films 373 (2000) 189
14. Moriga T., Okamoto T., Hiruta K., Fujiwara A., Nakabayashi I., and Tominaga K. J. Solid State Chem. 155 (2000) 312
15. Minami T., Kakumu T., Shimokawa K., and Takata S. Thin Solid Films 317 (1998) 318
16. J.R. Lee, D.Y. Lee, D.G. Kim, G.H. Lee, Y.D. Kim, H.S. Lee, K.R. Kim and P.K. Song, Submitted for publication to Met. Mater. Int.
17. Shigesato Y., and Paine D.C. Appl. Phys. Lett. 62 (1993) 1268
18. Cho S.H., Park J.H., Lee S.C., Cho W.S., Lee J.H., Yon H.H., and Song P.K. J. Phys. Chem. Solids 69 (2008) 1334
19. Phillips J.M., Cava R.J., Thomas G.A., Carter S.A., Kwo J., Siegrist T., Krajewski J.J., Marshall J.H., Peck, Jr. W.F., and Rapkine D.H. Appl. Phys. Lett. 67 (1995) 2246
20. Rauf I.A., and Brown L.M. Scr. Metall. Mater. 30 (1994) 797
21. Paine D.C., Whitson T., Janiac D., Beresford R., and Yang C.O. J. Appl. Phys. 85 (1999) 8445