Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 927-931

  Kim, Dong Ho ^a   Park, Mi Rang ^a   Lee, Gun Hwan ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Electrical transport properties; ITO; Microstructure; Plastic substrate; Sputtering

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; FILM PREPARATION; HEATING; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OXYGEN; PLASTICS; POLYCRYSTALLINE MATERIALS; TRANSPORT PROPERTIES;

INDIUM TIN OXIDE; PLASMA DEPOSITION;

THIN FILMS;

DEPOSITION; ELECTRIC CONDUCTIVITY; FILM PREPARATION; HEATING; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OXYGEN; PLASTICS; POLYCRYSTALLINE MATERIALS; THIN FILMS; TRANSPORT PROPERTIES;

EID: 33748430470     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.01.004     Document Type: Article

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