Electrical and optical properties of In2O3-ZnO films deposited on polyethylene terephthalate substrates by radio frequency magnetron sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 1, 2003, Pages 223-227

  Kim, Hwa Min ^a,b   Jung, Sang Kuan ^a   Ahn, Jeung Sun ^b   Kang, Young Jin ^b   Je, Koo Chul ^b  

^a Catholic University of Daegu   (South Korea)

^b JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

IZO and ITO films; PET substrate; Rf magnetron sputtering; Surface uniformity; TCO; The AFM images

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; ETCHING; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYETHYLENE TEREPHTHALATES; TEMPERATURE; ZINC COMPOUNDS;

AMORPHOUS STRUCTURES; ELECTRIC STABILITY; INDIUM TIN OXIDE; RADIO FREQUENCY MAGNETRON SPUTTERING; SURFACE UNIFORMITY; TRANSPARENT CONDUCTING OXIDE;

CONDUCTIVE MATERIALS;

EID: 0037667802     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.42.223     Document Type: Article

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