Transparent conducting zinc-co-doped ITO films prepared by magnetron sputtering

Thin Solid Films

Volumn 373, Issue 1-2, 2000, Pages 189-194

  Minami, Tadatsugu ^a   Yamamoto, Takashi ^a   Toda, Yukinobu ^a   Miyata, Toshihiro ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FILM PREPARATION; MAGNETRON SPUTTERING; OXIDES; SEMICONDUCTING ZINC COMPOUNDS; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS;

INDIUM TIN OXIDES; TRANSPARENT CONDUCTING OXIDES;

CONDUCTIVE FILMS;

EID: 0034262459     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01132-9     Document Type: Article

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