Composite polymer core-ceria shell abrasive particles during oxide CMP: A defectivity study

Journal of the Electrochemical Society

Volumn 155, Issue 9, 2008, Pages

  Armini, S ^a,b   De Messemaeker, J ^c   Whelan, C M ^a   Moinpour, M ^d   Maex, K ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UMICORE   (Belgium)

^d INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; CARBON FIBER REINFORCED PLASTICS; CERIUM COMPOUNDS; CHEMICAL MECHANICAL POLISHING; CHEMICAL POLISHING; CHEMICAL PROPERTIES; CLADDING (COATING); COMPLEXATION; COMPOSITE STRUCTURES; COUPLING AGENTS; MECHANICAL PROPERTIES; NANOTECHNOLOGY; POLYMERS; SILANES; SILICA; SILICATE MINERALS; SILICON COMPOUNDS; SLURRIES; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL);

ABRASIVE PARTICLES; ATTRACTIVE INTERACTIONS; CERIA PARTICLES; CHEMICAL-; COMPOSITE POLYMERS; DEFECTIVITY; ELASTIC COMPONENTS; FUMED SILICA; REMOVAL RATE; ROOT-MEAN-SQUARE ROUGHNESS; SILANE COUPLING AGENTS; SILICA SLURRIES; SURFACE COMPOSITIONS; SYNTHESIS PARAMETERS; TWO TYPES;

PLASTIC COATINGS;

EID: 49149096626     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2949085     Document Type: Article

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