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Volumn 155, Issue 4, 2008, Pages

Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

(7) Armini, Silvia a,b Burtovyy, Ruslan c Moinpour, Mansour d Luzinov, Igor c De Messemaeker, Joke e Whelan, Caroline M b Maex, Karen a

a UNIVERSITY OF LEUVEN (Belgium)

b IMEC (Belgium)

c South (United States)

d INTEL CORPORATION (United States)

e UMICORE (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COUPLING AGENTS; PH EFFECTS; REMOVAL; TERPOLYMERS;

CHEMICAL MECHANICAL PLANARIZATION (CMP); INTERACTION FORCES;

POLYMETHYL METHACRYLATES;

EID: 40549130085 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.2834456 Document Type: Article

Times cited : (13)

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