Dielectric charging mechanisms in RF-MEMS capacitive switches

Proceedings of the 37th European Microwave Conference, EUMC

Volumn , Issue , 2007, Pages 1157-1160

  Papaioannou, George J ^a,b   Papapolymerou, John ^b  

^a UNIVERSITY OF ATHENS   (Greece)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DIELECTRIC FILMS; ELECTRIC SWITCHES; FINANCE; MECHANISMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; POLARIZATION; SILICON; SURFACE CHARGE; TIME SWITCHES;

CAPACITIVE SWITCHING; CHARGING MECHANISMS; DIELECTRIC CHARGING; DIPOLAR POLARIZATION; DOMINANT MECHANISM; EUROPEAN; FILM SURFACES; HIGHER TEMPERATURES; RF-MEMS; RF-MEMS SWITCHES; ROOM TEMPERATURES; SPACE CHARGE POLARIZATION;

FEES AND CHARGES;

EID: 48349086150     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2007.4405404     Document Type: Conference Paper

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