Design of a robust PID-control switching scheme for an electrostatic micro-actuator

Control Engineering Practice

Volumn 16, Issue 11, 2008, Pages 1321-1328

  Vagia, Marialena ^a   Nikolakopoulos, George ^a   Tzes, Anthony ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

LMIs; MEMS; Micro actuator; Robust PID controller design; Switching control

Indexed keywords

ACTUATORS; ELECTRIC CONTROL EQUIPMENT; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; LINEAR CONTROL SYSTEMS; LINEARIZATION; MICROACTUATORS; THREE TERM CONTROL SYSTEMS; TIME VARYING CONTROL SYSTEMS; TWO TERM CONTROL SYSTEMS;

(E ,2E) THEORY; CONTROL SWITCHING; CONVEX HULLS; ELSEVIER (CO); FEED-FORWARD COMPENSATORS; MICRO ACTUATORS; MULTIPLE OPERATING POINTS; NON LINEAR MODELING; OPERATING POINTS; PID CONTROLLERS; ROBUST PID; SET-POINT REGULATION; SIMULATION STUDIES;

PROPORTIONAL CONTROL SYSTEMS;

EID: 47549099393     PISSN: 09670661     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.conengprac.2008.03.001     Document Type: Article

References (32)

1. Agarwal A., Sridharamurthy S., and Beebe D. Programmable autonomous micromixers and micropumps. IEEE Journal of Microelectromechanical Systems 14 (2005) 1409-1421
2. Boyd, S., Ghaoui, L., Feron, E., & Balakrishnan, V. (1994). Linear matrix inequalities in system and control theory. SIAM studies in applied mathematics. Philadelphia, PA: SIAM.
3. Canuto E. Sub-nanometric optics stabilization in view of the GAIA astrometic mission. Control Engineering Practice 11 (2003) 569-578
4. Chen C. A simple method for on-line identification and controller tuning. AIChE 35 (1989) 2037-2039
5. Cheng Y., and Yu C. Nonlinear process control using multiple models: Relay feedback approach. Industrial Engineering Chemistry 39 (2000) 420-431
6. Ge M., Chiu M., and Wang Q. Robust PID controller design via LMI approach. Journal of Process Control 12 (2002) 3-13
7. Hong S., Varadan V., and Varadan V. Implementation of coupled mode optimal structural vibration control using approximated eigenfunctions. Smart Materials and Structures 7 (1998) 63-71
8. Hongfei, S., & Jun, Z. (2001). Control Lyapunov functions for switched control systems. In Proceedings of the 2001 American control conference (pp. 1890-1891), Arlington, VA, June 2001.
9. Ishihara H., Arai F., and Fukuda T. Micro mechatronics and micro actuators. IEEE/ASME Transactions on Mechatronics 1 (1996) 68-79
10. Judy J. Microelectromechanical systems (MEMS): Fabrication, design and applications. Smart Materials and Structures 10 (2001) 1115-1134
11. Lam H.K., Leung F.H.F., and Tam P.K.S. A switching controller for uncertain nonlinear systems. IEEE Control on System Management 22 (2002) 7-14
12. Lee A., McConaghy C., Sommargren G., Krulevitch P., and Campbell E. Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry. Journal of Microelectromechanical Systems 12 (2003) 960-971
13. Lu M.S.C., and Fedder G. Position control of parallel-plate microactuators for probe-based data storage. Journal of Microelectromechanical Systems 13 (2004) 759-769
14. Lyshevski E. Micro-electromechanical systems: Motion control of micro-actuators. IEEE/ASME Transactions on Mechatronics 10 (1998) 363-385
15. Lyshevski, E. (1998b). Micro-electromechanical systems: Motion control of micro-actuators. In Proceedings of the 37th IEEE conference on decision and control, Tampa, FL.
16. Maithripala D., Berg J., and Dayawansa P. Control of an electrostatic microelectromechanical system using static and dynamic output feedback. ASME's Journal of Dynamic Systems, Measurement, and Control 127 (2005) 443-450
17. Meister T., Werner H., Lohofer G., Herlach D.M., and Unbehaunen H. Gain-scheduled control of an electrostatic levitator. Control Engineering Practice 11 (2003) 117-128
18. Menciassi A., Eisinberg A., Izzo I., and Dario P. From "macro" to "micro" manipulation: Models and experiments. IEEE-ASME Transactions on Mechatronics 9 (2004) 311-320
19. Narendra K.S., Balakrishnan J., and Ciliz K. Adaptation and learning using multiple models, switching and tuning. IEEE Control Systems Magazine 15 (1995) 37-51
20. Pirie C., and Dullerud G. Robust controller synthesis for uncertain time-varying systems. SIAM Journal on Control and Optimization 40 (2002) 1312-1331
21. Rocha L.A., Cretu E., and Wolffenbuttel R.F. Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning. Journal of Microelectromechanical Systems 15 (2006) 69-83
22. Seeger J.I., and Boser B.E. Charge control of parallel-plate, electrostatic actuators and the tip-in instability. Journal of Microelectromechanical Systems 12 (2003) 656-671
23. Seeger, J. I., & Crary, S. B. (2007). Stabilization of electrostatically actuated mechanical devices. In Proceedings of solid state sensors and actuators (transducers) (Vol. 2, pp. 1133-1136), Chicago, IL, 1997.
24. Shao Y., Dickensheets D.L., and Himmer P. 3-D MOEMS mirror for laser beam pointing and focus control. IEEE Journal of Selected Topics in Quantum Electronics 10 (2004) 528-535
25. Sung L., Yongsang Q.K., and Dae-Gab G. Continuous gain scheduling control for a micro-positioning system: Simple, robust and no overshoot responser. Control Engineering Practice 8 (2000) 133-138
26. Suthasun T., Mareels I., and Al-Mamun A. System identification and controller design for dual actuated hard disk drive. Control Engineering Practice 12 (2004) 665-676
27. ∞ control of a μ-actuator. In Proceedings of the IFAC World Congress, Prague, Czech, Article no. 4455.
28. Vagia M., Nikolakopoulos G., and Tzes A. Intelligent robust controller design for a micro-actuator. Journal of Intelligent and Robotic Systems 47 (2006) 299-315
29. ∞-control scheme for an electrostatic micro-actuator with structured uncertainty. In Proceedings of the IEEE multi conference on systems and control (pp. 130-135) (CCA 2007 and ISIC 2007), Singapore, October.
30. Zarubinskaya M., and Horssen W. On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs. Journal of Sound and Vibration 278 (2003)
31. Zhang H., Laws A., Bright V., Gupta K., and Lee Y. MEMS variable-capacitor phase shifters. Part I: Loaded-line phase shifter. International Journal of RF and Microwave Computer-Aided Engineering 13 (2003) 321-337
32. Zolotas, A., Tzes, A., & Vagia, M. (2007). Robust control design for an uncertain electrostatic micro-mechanical system via loop shaping. In Proceedings of the European control conference (pp. 389-394) (ECC' 07), Kos, Greece, July 2007.