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Volumn , Issue , 2007, Pages 130-135

An H∞-control scheme for an electrostatic micro-actuator with structured uncertainty

Author keywords

[No Author keywords available]

Indexed keywords

DASHPOTS; ELECTROSTATIC MICRO-ACTUATOR;

EID: 43049156504     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CCA.2007.4389218     Document Type: Conference Paper
Times cited : (1)

References (31)
  • 1
    • 0038452347 scopus 로고    scopus 로고
    • Reliability aspects of microsensors and micromechatronic actuators for automotive applications
    • R. Muller-Fiedler, V. Knoblauch "Reliability aspects of microsensors and micromechatronic actuators for automotive applications," in Journal of Microelectronics Realibility, vol.43, pp.1085-1097, 2003.
    • (2003) Journal of Microelectronics Realibility , vol.43 , pp. 1085-1097
    • Muller-Fiedler, R.1    Knoblauch, V.2
  • 2
    • 32244441217 scopus 로고    scopus 로고
    • Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning
    • L.A. Rocha, E. Cretu and R.F. Wolffenbuttel, "Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning," in Journal of Microelectromechanical Systems, vol. 15, pp. 69-83, 2006.
    • (2006) Journal of Microelectromechanical Systems , vol.15 , pp. 69-83
    • Rocha, L.A.1    Cretu, E.2    Wolffenbuttel, R.F.3
  • 3
    • 0242636508 scopus 로고    scopus 로고
    • Charge control of parallel-plate, electrostatic actuators and the tip-in instability
    • J.I. Seeger, B.E. Boser,"Charge control of parallel-plate, electrostatic actuators and the tip-in instability," Journal of Microelectromechanical Systems, vol. 12,pp. 656-671, 2003.
    • (2003) Journal of Microelectromechanical Systems , vol.12 , pp. 656-671
    • Seeger, J.I.1    Boser, B.E.2
  • 4
    • 0035689377 scopus 로고    scopus 로고
    • Microelectromechanical systems (MEMS): Fabrication, design and +applications
    • J.W. Judy " Microelectromechanical systems (MEMS): fabrication, design and +applications" Smart materials and Structures, vol. 10 pp. 1115-1134,2001
    • (2001) Smart materials and Structures , vol.10 , pp. 1115-1134
    • Judy, J.W.1
  • 5
    • 33748323052 scopus 로고    scopus 로고
    • Demonstration of robust micromachined jet technology and its application to realistic flow control problems
    • S. Chang, "Demonstration of robust micromachined jet technology and its application to realistic flow control problems," in Journal of Mechanical Science and Technology, vol. 20, pp. 554-560, 2006.
    • (2006) Journal of Mechanical Science and Technology , vol.20 , pp. 554-560
    • Chang, S.1
  • 7
    • 27944469950 scopus 로고    scopus 로고
    • Performance testing of a microfabricated propulsion system for nanosatellite applications
    • A. Ketsdever, R. Lee and T. Lilly "Performance testing of a microfabricated propulsion system for nanosatellite applications," in Journal of Micromechanics and Microengineering, vol.15, pp.2254-2263, 2005.
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , pp. 2254-2263
    • Ketsdever, A.1    Lee, R.2    Lilly, T.3
  • 11
    • 0034270553 scopus 로고    scopus 로고
    • Electrostatic Micromechanical Actuator with extended range of travel
    • E. Chen and R.W. Dutton, "Electrostatic Micromechanical Actuator with extended range of travel," Journal of microelectromechanical Systems., vol. 9, pp. 321-328, 2000.
    • (2000) Journal of microelectromechanical Systems , vol.9 , pp. 321-328
    • Chen, E.1    Dutton, R.W.2
  • 12
    • 0742319375 scopus 로고    scopus 로고
    • Vertical - actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry
    • December
    • A. Lee, C. McConaghy, G. Sommargren, P. Krulevitch, and E. Campbell, "Vertical - actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry," Journal of Microelectromechanical Systems, vol. 12, pp. 960-971, December 2003.
    • (2003) Journal of Microelectromechanical Systems , vol.12 , pp. 960-971
    • Lee, A.1    McConaghy, C.2    Sommargren, G.3    Krulevitch, P.4    Campbell, E.5
  • 13
    • 7244250408 scopus 로고    scopus 로고
    • Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage
    • M.S.C. Lu and G. Fedder, "Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage," Journal of microelectromechanical Systems., vol. 13, pp. 759-769, 2004.
    • (2004) Journal of microelectromechanical Systems , vol.13 , pp. 759-769
    • Lu, M.S.C.1    Fedder, G.2
  • 14
    • 85128555423 scopus 로고    scopus 로고
    • J. Bryzek, H. Abbott, A. Flannery, D. Cagle, J. Maitan, Control issues for MEMS, In the Proceedings of the 2003 Conference on Decision and Control, Ventures, Fremont, CA, USA, December 2003, pp. 3039-3047.
    • J. Bryzek, H. Abbott, A. Flannery, D. Cagle, J. Maitan, "Control issues for MEMS," In the Proceedings of the 2003 Conference on Decision and Control, Ventures, Fremont, CA, USA, December 2003, pp. 3039-3047.
  • 16
    • 0033887947 scopus 로고    scopus 로고
    • Continuous gain scheduling control for a micro-positioning system: Simple, robust and no overshoot response
    • L. Sung, Q.K Yongsang and G. Dae-Gab "Continuous gain scheduling control for a micro-positioning system: Simple, robust and no overshoot response" Control Engineering Practice vol.8, pp. 133-138, 2000.
    • (2000) Control Engineering Practice , vol.8 , pp. 133-138
    • Sung, L.1    Yongsang, Q.K.2    Dae-Gab, G.3
  • 18
    • 0142200025 scopus 로고    scopus 로고
    • D. H. S. Maithripala, J. M. Berg, and W. P. Dayawansa, Capacitive stabilization of an electrostatic actuator: Output feedback viewpoint, In the Proceedings of the 2003 American Control Conference, Denver, CO, 4-6 June 2003, pp. 4653-4058.
    • D. H. S. Maithripala, J. M. Berg, and W. P. Dayawansa, "Capacitive stabilization of an electrostatic actuator: Output feedback viewpoint," In the Proceedings of the 2003 American Control Conference, Denver, CO, 4-6 June 2003, pp. 4653-4058.
  • 19
    • 0031998261 scopus 로고    scopus 로고
    • Implementation of coupled mode optimal structural vibration control using approximated eigenfunctions
    • S. Hong, V. Varadan, and V. Varadan, "Implementation of coupled mode optimal structural vibration control using approximated eigenfunctions," Smart Material and Structures, vol. 7, pp. 63-71, 1998.
    • (1998) Smart Material and Structures , vol.7 , pp. 63-71
    • Hong, S.1    Varadan, V.2    Varadan, V.3
  • 20
    • 37949050464 scopus 로고    scopus 로고
    • On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs,
    • Report 03-09, DELFT University of Technology
    • M. Zarubinskaya and W. Horssen, "On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs," Report 03-09, DELFT University of Technology, 2003.
    • (2003)
    • Zarubinskaya, M.1    Horssen, W.2
  • 21
    • 43049182560 scopus 로고    scopus 로고
    • ∞ control of a μ-actuator, In the Proceedings of the 2005 IFAC World Congress, article no.4455, (Prague, Czech), July 2005.
    • ∞ control of a μ-actuator," In the Proceedings of the 2005 IFAC World Congress, article no.4455, (Prague, Czech), July 2005.
  • 22
    • 43049178922 scopus 로고    scopus 로고
    • H., K. Khalil Nonlinear Systems. Pearson Education International, New Jersey,2000.
    • H., K. Khalil Nonlinear Systems. Pearson Education International, New Jersey,2000.
  • 25
    • 0033907827 scopus 로고    scopus 로고
    • A tutorial on linear and bilinear Matrix Inequalities
    • J. VanAntwep and R. Braatz, "A tutorial on linear and bilinear Matrix Inequalities," Journal of Process Control, vol. 10, pp. 363-385, 2000.
    • (2000) Journal of Process Control , vol.10 , pp. 363-385
    • VanAntwep, J.1    Braatz, R.2
  • 26
    • 0029325388 scopus 로고
    • Adaptation and Learning using multiple models,switching and tuning
    • K. Narendra, J. Balakrishnan, and M.K.Ciliz, "Adaptation and Learning using multiple models,switching and tuning," IEEE Control Systems Magazine, vol. 15, pp. 37-51, 1995.
    • (1995) IEEE Control Systems Magazine , vol.15 , pp. 37-51
    • Narendra, K.1    Balakrishnan, J.2    Ciliz, M.K.3
  • 27
    • 0034144308 scopus 로고    scopus 로고
    • Nonlinear process control using multiple models: Relay feedback approach
    • Y. Cheng and C. Yu, "Nonlinear process control using multiple models: relay feedback approach," Industrial Eng.Chem., vol. 39, pp. 420-431, 2000.
    • (2000) Industrial Eng.Chem , vol.39 , pp. 420-431
    • Cheng, Y.1    Yu, C.2
  • 29
    • 0030192253 scopus 로고    scopus 로고
    • ∞ Synthesis
    • ∞ Synthesis," Automatica, vol. 32, pp.1007-114 1996.
    • (1996) Automatica , vol.32 , pp. 1007-1114
    • Gabinet, P.1
  • 30
    • 0030106702 scopus 로고    scopus 로고
    • Affine parameter-dependent Lyapunov functions and real parametric uncertainty
    • P. Gahinet, P. Apkarian, M. Chilali, "Affine parameter-dependent Lyapunov functions and real parametric uncertainty," IEEE Transactions on Automatic Control, vol. 41, pp.436-442. 1996.
    • (1996) IEEE Transactions on Automatic Control , vol.41 , pp. 436-442
    • Gahinet, P.1    Apkarian, P.2    Chilali, M.3
  • 31
    • 43049157072 scopus 로고    scopus 로고
    • S. Hongfei, Z. Jun, Control Lyapunov functions for switched control systems, In the Proceedings of the 2001 American Control Conference,Crystal Gateway Marriott Arlington, Virginia, June 2001.
    • S. Hongfei, Z. Jun, " Control Lyapunov functions for switched control systems," In the Proceedings of the 2001 American Control Conference,Crystal Gateway Marriott Arlington, Virginia, June 2001.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.