Improvement of UV-moulding accuracy by heat and solvent assisted process

Microelectronic Engineering

Volumn 85, Issue 2, 2008, Pages 263-270

  Pietarinen, Juha ^a   Kalima, Valtteri ^a   Pakkanen, Tuula T ^a   Kuittinen, Markku ^a  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Microstructures; Photopolymers; Replication; UV moulding

Indexed keywords

CHEMICAL PROPERTIES; CURING; FORMING; HYDRODYNAMICS; MOLDING; OPTICAL PROPERTIES; POLYMERS; SEMICONDUCTING CADMIUM TELLURIDE; VISCOSITY;

ASSISTED PROCESSING; CHEMICAL CHANGES; COMPRESSION FORCES; FACE-WIDTH; MATE RIAL PROPERTIES; MICRO-OPTICS; NOVEL PROCESSES; OPTICAL (PET) (OPET); PRE POLYMERS; PRE-POLYMERS; PROCESS TEMPERATURES; REPLICATION PROCESSES; REPLICATION TECHNIQUES; RETRO REFLECTORS; UV CURABLE;

SOLVENTS;

EID: 47049119607     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.06.001     Document Type: Article

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