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Microelectronic Engineering

Volumn 83, Issue 3, 2006, Pages 492-498

Fabrication of Ni-shims using UV-moulding as an intermediate step

(5) Pietarinen, Juha a Siitonen, Samuli a Tossavainen, Noora a Laukkanen, Janne a Kuittinen, Markku a

a UNIVERSITY OF EASTERN FINLAND (Finland)

Author keywords

Ni shims; UV moulding

Indexed keywords

CRACK INITIATION; ELECTROFORMING; ELECTRON BEAM LITHOGRAPHY; MOLDING; NICKEL;

MICRONS; NI-SHIMS; UV-MOULDING;

SHIMS;

EID: 33244495333 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2005.11.015 Document Type: Article

Times cited : (17)

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