Polymer replication of 3D microstructures employing a high content fluorine separation layer

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 206-211

  Braun, A ^a   Meinhardt, J ^a   Zimmer, K ^a   Hoßelbarth B ^a   Bigl, F ^a  

^a Inst F Oberflachenmodifizierung   (Germany)

Author keywords

3D structuring; Excimer laser; Plasma polymerization; Polymer ablation; Replication; Separation layer

Indexed keywords

EID: 0345921723     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00422-X     Document Type: Article

References (14)

1. J. Arnold, U. Dasbach, W. Ehrfeld, K. Hesch, H. Löwe, Appl. Surf. Sci. 86 (1995) 251.
2. R. Srinivasan, Journal of Radiation Curing, Oct. 12, 1983.
3. B. Braren, R. Srinivasan, J. Vac. Sci. Technol. B 3 (1985) 913.
4. S. Lazare, W. Guan, D. Drilhole, Appl. Surf. Sci. 96-98 (1996) 605.
5. D. Feldmann, J. Kutzner, J. Laukempner, S. MacRobert, K.H. Welge, Appl. Phys. B 44 (1987) 81.
6. J. Ihlemann, B. Wolff-Rottke, Appl. Surf. Sci. 106 (1996) 282.
7. M.C. Gower, P.T. Rumsby, D.T. Thomas, SPIE Vol. 1835 Excimer Lasers, 1992, 133.
8. Ch. Hahn, Th. Kunz, U. Dahn, O. Nuyken, A. Wokaun, Appl. Surf. Sci. 127-129 (1998) 899.
9. K. Rubahn, J. Ihlemann, Appl. Surf. Sci. 127-129 (1998) 881.
10. K. Zimmer, D. Hirsch, F. Bigl, Appl. Surf. Sci. 96-98 (1996) 425.
11. H. Yusada, Plasma Polymerization, Academic Press, London, 1985.
12. F. Poncin-Epaillard, G. Legeay, J.-C. Brosse, J. Appl. Pol. Sci. 44 (1992) 1513.
13. A. Braun, K. Zimmer, B. Hößelbarth, J. Meinhardt, F. Bigl, R. Mehnert, Appl. Surf. Sci 127-129 (1998) 911.
14. H.-J. Kahlert, U. Sauerbach, B. Burghardt, B. Klimt, SPIE Vol. 1835 Excimer Lasers, 1992, 110.