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Volumn 2, Issue 4, 2003, Pages 356-359

Replication of micro-optical components by ultraviolet-molding process

Author keywords

Microlens array; Optical component; Ultraviolet molding

Indexed keywords


EID: 34548257583     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1611183     Document Type: Article
Times cited : (15)

References (14)
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    • M. T. Gale, "Replication techniques for diffractive optical elements," Microeleclron. Eng. 34, 321-339 (1997).
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    • Gale, M.T.1
  • 3
    • 0001324887 scopus 로고    scopus 로고
    • Simple technique for replication of micro-optical elements
    • P. Nussbaum, I. Philipoussis, A. Husser, and H. P. Herzig, "Simple technique for replication of micro-optical elements," Opt. Eng. 37(6), 1804-1808 (1998).
    • (1998) Opt. Eng. , vol.37 , Issue.6 , pp. 1804-1808
    • Nussbaum, P.1    Philipoussis, I.2    Husser, A.3    Herzig, H.P.4
  • 4
    • 0024769720 scopus 로고
    • Low waveforont aberration and high-temperature stability molded micro Fresnel lens
    • N. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, and K. Imanaka, "Low waveforont aberration and high-temperature stability molded micro Fresnel lens," IEEE Photonics Technol. Lett. 1(11), 384-385 (1989).
    • (1989) IEEE Photonics Technol. Lett. , vol.1 , Issue.11 , pp. 384-385
    • Tanigami, N.1    Ogata, S.2    Aoyama, S.3    Yamashita, T.4    Imanaka, K.5
  • 5
    • 0032626484 scopus 로고    scopus 로고
    • Wafer scale integration of micro-optic and optoelectronic elements by polymer UV reaction molding
    • P. Dannberg, R. Bierbaum, L. Erdmann, and A. Brauer, "Wafer scale integration of micro-optic and optoelectronic elements by polymer UV reaction molding," in Photonics Packaging and Integration, Proc. SPIE 3631, 244-251 (1999).
    • (1999) Photonics Packaging and Integration, Proc. SPIE , vol.3631 , pp. 244-251
    • Dannberg, P.1    Bierbaum, R.2    Erdmann, L.3    Brauer, A.4
  • 9
    • 5344268855 scopus 로고    scopus 로고
    • Mold-assisted nanolithography: a process for reliable pattern replication
    • J. Haisma, M. Verheijen, K. Heuvel, and J. Berg, "Mold-assisted nanolithography: a process for reliable pattern replication," J. Vac. Sci. Technol. B 14(6), 4124-4128 (1996).
    • (1996) J. Vac. Sci. Technol. , vol.B14 , Issue.6 , pp. 4124-4128
    • Haisma, J.1    Verheijen, M.2    Heuvel, K.3    Berg, J.4
  • 10
    • 0033779368 scopus 로고    scopus 로고
    • Photopolymerizable liquid en-capsulants for microelectronic devices
    • K. K. Baikerikar and A. B. Scranton, "Photopolymerizable liquid en-capsulants for microelectronic devices," Polymer 42, 431-441 (2001).
    • (2001) Polymer , vol.42 , pp. 431-441
    • Baikerikar, K.K.1    Scranton, A.B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.